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Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
2019
Matthias Kocher
B.T. Yao
Julietta Weisse
Mathias Rommel
Zongwei Xu
Tobias Erlbacher
Anton J. Bauer
Keywords:
Metallurgy
Materials science
Composite material
Correction
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