Dynamic spectroscopic ellipsometry based on a one-piece polarizing interferometric scheme
2020
Abstract A dynamic spectroscopic ellipsometer based on a one-piece interferometric polarization-modulation is described. The proposed system can provide spectro-ellipsometric parameters Ψ ( λ ) and Δ ( λ ) with a real time speed of a few tens of milliseconds for 1,640-points spectra while maintaining high precision of less than 0.02 degrees. The ultrafast measurement capability enables the novel concept to be applied for a dynamic solution by which we can measure even the thin film thickness of moving samples dynamically.
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