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Silicon-containing materials for sub-65 nm etch
Silicon-containing materials for sub-65 nm etch
2007
Eric Scott Moyer
Jeffrey N. Bremmer
C. Brick
Peng-Fei Fu
A. Shirahata
Sheng Wang
Craig Rollin Yeakle
Keywords:
Etch pit density
Composite material
Materials science
Silicon
Optoelectronics
Correction
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