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Study of interactions between a-Ta films and SiO 2 under rapid thermal annealing
Study of interactions between a-Ta films and SiO 2 under rapid thermal annealing
2004
Zhi-Ling Yuan
Dao Hua Zhang
C.Y. Li
Krishnamachar Prasad
Christopher Tan
Keywords:
X-ray crystallography
Inorganic chemistry
Annealing (metallurgy)
Thermal stability
Materials science
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