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PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors
PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors
2018
Etienne Puyoo
Daniel Thomas
Martine Le Berre
L. Militaru
C. Malhaire
Siddardha Koneti
Solène Brottet
Rémi Rafael
Matthieu Bugnet
Annie Malchère
T. Epicier
Lucian Roiban
Keywords:
Optoelectronics
Transistor
single electron
pt nanoparticles
Strain (chemistry)
Materials science
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