The use of composite piezoelectric thick films for actuation and control of miniature cantilevers

Abstract A control and actuation system is described which utilises a single active piezoelectric composite thick film and optical vibration sensing. This system enables unwanted vibrations of the cantilever to be cancelled, whilst maintaining the ability to deflect the cantilever statically or dynamically as required. The use of such piezoelectric elements in scanning probe microscopes is duscussed.