Manufacture method for high-luminous-efficiency flip LED with periodical patterns at light emitting surface

The invention provides a manufacture method for a high-luminous-efficiency flip LED with periodical patterns at the light emitting surface, and relates to the technical field of LED production. A silicon substrate is vapor-plated with AlN, figures are etched, a nitride material is grown on the figures, the flip LED device is made, the silicon substrate is peeled, and thus, the LED chip with back emission improves the light emitting efficiency.