Method for forming a micro-lens of an image sensor, and manufacturing the image sensor

2009 
Methods of forming a microlens are disclosed. In one embodiment, a method for forming a microlens of an image sensor includes: coating a photoresist for forming microlenses on a substrate of an image sensor; allowing laser light to be incident on the inside of the photoresist to create a standing wave, the laser light affecting portions of the photoresist positioned in the amplitude range of the laser light; and forming microlenses by curing the photoresist having the laser light affected portions. With the proposed method for forming the microlenses, various sizes of microlenses can be formed and fine size of microlenses can be formed by, for example, adjusting the wavelength of the laser light.
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