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Strategies to Enhance Etch Selectivity During Plasma-Assisted Atomic Layer Etching of Silicon-Based Dielectrics
Strategies to Enhance Etch Selectivity During Plasma-Assisted Atomic Layer Etching of Silicon-Based Dielectrics
2020
Ryan James Gasvoda
Keywords:
layer
Etching (microfabrication)
Plasma etching
Materials science
Infrared spectroscopy
Selectivity
silicon based
Optoelectronics
Dielectric
Plasma
Correction
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