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Change of carbon nanolayer properties by means of ion and laser irradiation
Change of carbon nanolayer properties by means of ion and laser irradiation
2019
Yu. A. Danilov
Yu. A. Dudin
R. N. Kryukov
V. P. Lesnikov
E. A. Pitirimova
A. E. Parafin
Keywords:
Thin film
Ion
Irradiation
Laser
Materials science
Chemical engineering
Ion implantation
Nanomaterials
Carbon
Silicon
Correction
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