Investigation of Temperature Fluctuation Resulted in Dissolved Gas for Single-Phase Microchannel Heat Sink

Experiments show that the integrated thin film temperature sensors can monitor the temperature fluctuation in the channels accurately. When the temperature of coolant not reach threshold value of phase change, the amount of micro gas bubbles separated out in the heated micro channels, which increase the temperature fluctuation obviously. Such temperature fluctuation is both critical to the reliability of power IC and microchannel based heat sink.