Electro-mechanical simulation of programming / readout characteristics for NEMS memory

Tasuku Nagami, Nobuyuki Momo, Yoshishige Tsuchiya, Shinichi Saito, Tadashi Arai, Toshikazu Shimada, Hiroshi Mizuta, and Shunri Oda 1 Quantum Nanoelectronics Research Center, Tokyo Institute of Technology, Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, Japan SORST JST (Japan Science and Technology) Central Research Laboratory, Hitachi Ltd., Tokyo, Japan Quantum 14 Co. Ltd., Tokyo, Japan *Phone: +81-3-5734-2542 FAX: +81-3-5734-2542 E-mail: nagami@neo.pe.titech.ac.jp