Hot Electron Transport Properties of Thin Copper Films Using Ballistic Electron Emission Microscopy
2009
Keywords:
- Electron beam physical vapor deposition
- Ballistic electron emission microscopy
- Electron scattering
- Energy filtered transmission electron microscopy
- Analytical chemistry
- Thin film
- Electron beam-induced deposition
- Elastic scattering
- Reflection high-energy electron diffraction
- Materials science
- Atomic physics
- Copper
- hot electron
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