Reproducible and arbitrary patterning of transparent ZnO nanorod arrays for optic and biomedical device integration

ABSTRACT Here, we report a robust method for fabricating ZnO nanorod arrays with arbitrary patterns on glass substrate for device integration applications. Photolithography patterned non-transparent Zn film is used as growth sites for ZnO nanorods in the hydrothermal reactions for facile and reproducible fabrication. Patterns including lines, dots, texts, and logos have been demonstrated and the dimension of ZnO nanorods are tunable. The semi-transparent ZnO nanorod/glass shows increased light transmission when immersed in water, which is an advantage when integrate into devices requiring optical imaging and sensing. For proof-of-concept purpose, surface-enhanced Raman scattering sensors based on Ag coated ZnO nanorods with back observation configuration are demonstrated and show high sensitivity.