Visible Luminescence from Controlled Multi-Layer Stack Comprising of Thin Amorphous Silicon and Silicon Nitride Layers

We report photoluminescence (PL) and electroluminescence (EL) from multi-layer alpha-silicon/Si 3 N 4 . Peak PL is tunable within the red region by varying alpha-Si thickness. EL result is also reported. This structure benefits from a low-thermal-budget process (les700degC).