COMPARISON OF IRRADIATION EFFECTS BETWEEN CLUSTER AND MONOMER FOR DLC FILM DEPOSITION

Diamond-like carbon (DLC) films were formed by Ar cluster ion beam assisted vapor deposition of C 60 . To study the effects of contaminating Ar monomer ions (Ar + ) in the cluster beam on the sp 2 content, hardness, and surface morphology of the films, beams of Ar cluster ions, Ar + , and a mixture of cluster ions and Ar + were used From the near edge X-ray absorption fine structure (NEXAFS), lower sp 2 contents in films were obtained when Ar cluster ion beams were used Higher hardness and smoother surfaces were also obtained by irradiations of Ar cluster ion with higher fraction