The MEMS Product: Functional Partitioning and Integration

The MEMS product is a system composed of more than just the MEMS device. The MEMS product also includes the package, electronics, software, and possibly other components. This chapter introduces the typical components of a MEMS product, their roles, the partitioning of functions among components of the system, and the possible levels of physical integration. We limit the discussion in this chapter to an overview of the function partitioning and do not discuss the very wide variety of possible physical implementations.