A high-speed high-sensitivity acoustic cell for in-line continuous monitoring of MOCVD precursor gases

Abstract We describe a continuous wave resonant acoustic sensor that has been optimized as a very sensitive in-line monitor for measuring the composition of precursor gases used in MOCVD processes. The precursor/carrier gas mixtures flow through a compact stainless steel acoustic chamber that is isolated from the acoustic transducers by a set of metallic diaphragms. The sensor has been successfully operated at supply line pressures from atmosphere down to 50 Torr with gas flow rates of up to 1600 sccm. The accuracy of the speed of sound measurement for hydrogen gas is better than 0.005%, even in a high noise and low pressure environment. Hydrogen, as well as nitrogen or argon carrier gases, are accommodated within the instrument's 1–5 kHz working frequency range. The instrument's sensitivity and stability are demonstrated with the laboratory data. Measurements of the dynamic response characteristics of the metalorganic bubbler lines at low pressure are also be presented. Application of the cell is general, encompassing any of the metalorganic and hydride materials typically used in MOCVD processes.