Apparatus and method for removing edge bead of substrate
2010
PURPOSE: A device and method for removing an edge bead of a substrate are provided to remove an edge bead occurring during a photo resist coating process, thereby preventing the yield of the substrate from decreasing. CONSTITUTION: A substrate supporting unit(1) rotates in a first direction. A roller(31) is arranged on a partial side of a substrate. The roller rotates in a direction opposite to the first direction. A cutter(32) cuts a bead attached to a side of the roller. A first spray nozzle sprays a photoresist solution onto the substrate. A second spray nozzle sprays a solvent solution onto a lower edge of the substrate. A third spray nozzle sprays a DI(Deionize) water solution onto the roller.
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