Peak detection of TOF-SIMS using continuous wavelet transform and curve fitting

Abstract Curve fitting is the most utilized technique to measure peak areas in time of flight secondary ion mass spectrometry (TOF-SIMS) spectra. Reliable estimations of peak parameters should be provided. However, there is not currently a reliable method to estimate the half-width of spectral peaks. In this study, we present a method for peak detection in TOF-SIMS spectra, incorporating continuous wavelet transform and curve fitting. The half-width was estimated by derivative spectrometry based on continuous wavelet transform. Accurate parameters of each peak were obtained by subsequent curve fitting. The method was evaluated with simulated and real TOF-SIMS spectra of silicon isotopes. The results showed this proposed method obtained more accurate half-width estimations of spectral peaks. The fitted results also showed that the method has better performance on overlapping peaks and better resistance to noise.