Properties of Co-Fired BaTiO3 Based Capacitor with Low Temperature Fired Multilayer Ceramic Substrates

A low temperature fired multilayer ceramic substrate with internally buried capacitor was investigated. The capacitor material was composed of BaTiO3 ceramic and co-fired with copper electrodes at about 950°C in a reducing atmosphere. The internal capacitors were values from 100pF to 6800pF. The temperature dependence of capacitance was comparatively flat. The DC bias characteristic was exellent.