Full-digital MEMS three-component geophone

The invention discloses a full-digital MEMS three-component geophone. The full-digital MEMS three-component geophone comprises a sealed waterproof shell, a control unit, a three-component wave detector, three signal conditioning circuits and three A/D converters, wherein the control unit is arranged in the sealed waterproof shell, the three-component wave detector is connected with the control unit and composed of three uniaxial MEMS sensors in an orthogonal mode, the three signal conditioning circuits are connected with the three uniaxial MEMS sensors in a one-to-one mode, and the three A/D converters are connected with the three signal conditioning circuits in a one-to-one mode through a multi-way simulation selector, and the three A/D converters are connected with the control unit. In addition, an inclination detection module and an inertia sensor are further connected to the control unit. By the adoption of the full-digital MEMS three-component geophone, the power supply internal management problems that in the prior art, a wave detector cannot consider posture method information and the multipurpose adaptability to the ground, logging and the like at the same time, cannot obtain internal temperature and humidity parameters in real time and is inefficient and high in power consumption are solved, and high practical value and research significance are achieved.