Rim morphology of nanopore for studying single biomolecule
2009
The fabrication and application of micro- and nanoscale containers and devices are recently attracted much attention. The
top profiles of these nanoscale patterns are very important for nano-devices integration. The morphologies of small
containers, nanopit and nanopore fabricated with focused ion beam (FIB) milling tool, are explored by atomic force
microscopy (AFM). The topography of every pattern looks like a volcano. The protruded ring-shaped structures
surrounding the crater are attributed to the swelling due to the amorphization when FIB processed the crystal silicon
nitride (Si3N4) substrate. In addition, the morphologies of anodic alumina oxide (AAO) membranes fabricated by
anodizing of metallic aluminum are discussed.
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