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Calculation of Pull-in-Voltage for MEMS based Micro-Cantilevers using Piezoelectric Actuation
Calculation of Pull-in-Voltage for MEMS based Micro-Cantilevers using Piezoelectric Actuation
2018
D. Bhattacharya
A Fahad
Keywords:
Microelectromechanical systems
Cantilever
Voltage
Electronic engineering
Piezoelectricity
Materials science
pull in voltage
Optoelectronics
Correction
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