Method for alignment of wafer and aligning equipment using of it

The present invention relates to a wafer alignment device and alignment method using the same, comprising the steps of: mounting a wafer comprising a notch (notch) for alignment on a stage the X-axis and the y-axis is set; A shooting a first image of the next wafer, then the wafer 180 rotates, the method comprising: recording a second image of the wafer; The step of comparing the first image and the second images, moving the center of the wafer to the x-axis of the stage; Taken a third image of the wafer, and then, after the wafer was rotated 180 degrees, the method comprising: recording a fourth image of the wafer; The step of comparing the third image and the fourth image by moving the center of the wafer with the y-axis of the stage to match the center of the wafer and the center of the stage; And a; and the step of rotating the wafer match the center line of the wafer passing through the notch lines and alignment of the stage.