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Packaging of In-Plane Micro-Actuators for BioMEMS Applications
Packaging of In-Plane Micro-Actuators for BioMEMS Applications
2005
Hrishikesh V. Panchawagh
David B. Serrell
Faheem F. Faheem
Cari F. Herrmann
Dudley S. Finch
Roop L. Mahajan
Keywords:
Actuator
Superhydrophobic coating
Atomic layer deposition
Nanotechnology
Flip chip
Encapsulation (computer programming)
Materials science
in plane
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