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Anti-Corrosion of Pyrolytic Carbon Film for SiC Epitaxial Reactor Cleaning
Anti-Corrosion of Pyrolytic Carbon Film for SiC Epitaxial Reactor Cleaning
2017
Kohei Shioda
Hitoshi Habuka
Hideki Ito
Shinichi Mitani
Yoshinao Takahashi
Keywords:
Pyrolytic carbon
Epitaxy
Silicon carbide
Metallurgy
Materials science
Anti-corrosion
Correction
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