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Pore sealing mechanism in OSG low‐k films under ion bombardment
Pore sealing mechanism in OSG low‐k films under ion bombardment
2019
Ekaterina N. Voronina
A A Sycheva
Dmitry Lopaev
T. V. Rakhimova
A. T. Rakhimov
Olga Proshina
D. G. Voloshin
Sergey Zyryanov
A I Zotovich
Yuri A. Mankelevich
Keywords:
Analytical chemistry
Ion
Materials science
Molecular dynamics
Chemical engineering
ion bombardment
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