Структура и термомехнические свойства покрытий на основе Si-Al-N при их осаждении методом импульсного магнетронного распыления

Coatings on the basis of Si-Al-N have been obtained by magnetron sputtering method. Their structure and phase composition were studied by the methods of atomic force microscopy and X-raystructural analysis. The influence of coating precipitation modes on their thermal-cycle resistance was found out.