Experimental study of a shearing interferometer concept for at-wavelength characterization of extreme-ultraviolet optics.
2001
We describe the experimental evaluation of a shearing
interferometer concept for at-wavelength testing of extreme-ultraviolet
optics. The concept is based on the Ronchi test, which has been
modified by a new design for entrance and exit gratings to suppress
disturbing higher-order interference patterns. The interferometer
concept has been tested on an experimental setup, of which all relevant
parameters have been scaled from extreme-ultraviolet to visible-light
wavelengths. A Twyman–Green interferometer has been integrated
into the setup for comparison with the improved Ronchi test. A
systematic difference of 7–12 mλ rms has been found between wave
fronts measured with the improved Ronchi test and with the
Twyman–Green interferometer. Possible error sources have been
analyzed. The accuracy of the interferometer is estimated to be 10
mλ rms.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
14
References
7
Citations
NaN
KQI