Method for manufacturing silicon carbide solar cell

Silicon carbide is provided a solar cell manufacturing method. SiC solar cell manufacturing method, the substrate preparation step; Forming a back electrode on the substrate to be processed; And a dopant source and a storage step of using a supplying and annealing module including a plasma generator to form a first single crystal silicon carbide layer on the substrate to be processed; The supply part and forming an intrinsic layer on the first silicon carbide single crystal layer by the annealing module HR yitu (in-situ) process using a; The feed and forming a second silicon carbide single crystal layer on the intrinsic layer by personnel yitu (in-situ) process using the annealing module; Includes; and forming a front electrode on the second silicon carbide single crystal layer.