Measuring cell arrangement for a pressure sensor with force measuring element of glass
2006
Measuring cell device (10) for a pressure sensor, with a loadable by a fluid to be measured with a pressure membrane (18) and a force measuring element (14) which is connected to a pressure side (22) of the membrane (18), so that it upon deflection the membrane (18) is deflected, wherein the force measuring element (14) comprises a substrate (15) made of glass and at least one on the glass substrate (15) applied resistive element (32) which changes its resistance at bending of the glass substrate (15), characterized in that the glass substrate (15) by means of a glass film (24) made of a glass whose melting point is below the melting point of the glass of the glass substrate (15) and below the melting point of the material of the membrane (18) is fixed on the membrane and that the the coefficient of thermal expansion α of the glass of the glass substrate
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