Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

Abstract Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH 4 ]) or benzene (denoted DLC[C 6 H 6 ]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH 4 ] sample was better than that of the DLC[C 6 H 6 ], even though the hardness of DLC[CH 4 ] was lower than that of DLC[C 6 H 6 ]. The wear loss of DLC[CH 4 ] and DLC[C 6 H 6 ] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.