Adaptive output feedback tracking control for piezoelectric-driven micropositioning stage via hysteresis observer

This paper presents the precision tracking control for a piezoelectric-driven micropositioning stage (PDMS) by resorting to a new adaptive output feedback control strategy. The dynamics model with the hysteresis state is established for the PDMS, where the Duhem model is used to illustrate the hysteresis behavior. Considering that the information of the hysteresis state is unknown in practice, a new extended hysteresis observer (NEHO) is proposed to estimate this state. With the help of the Takagi-Sugeno fuzzy neural network (TSFNN) approximator, the parameter identification of the PDMS can be circumvented. Then, based on the proposed NEHO, a new adaptive output feedback control (NEHO-AOFC) framework combining the dynamic surface control (DSC) and sliding mode control (SMC) is introduced, and the asymptotic stability of the closed-loop system is proved in theory. Finally, a series of comparative experiments are carried out on the PDMS to demonstrate the effectiveness of the constructed controller.