Old Web
English
Sign In
Acemap
>
Paper
>
A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer
A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer
2020
Takashi Ichikawa
Keywords:
Optoelectronics
Proof mass
Resolution (electron density)
Materials science
Accelerometer
cmos mems
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]