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Understanding Thickness Uniformity of Ga2O3 Thin Films Grown by Mist Chemical Vapor Deposition
Understanding Thickness Uniformity of Ga2O3 Thin Films Grown by Mist Chemical Vapor Deposition
2019
Minh-Tan Ha
Kyoung-Ho Kim
Yong-Jin Kwon
Cheol Jin Kim
Seong-Min Jeong
Si-Young Bae
Keywords:
Mist
Chemical vapor deposition
Thin film
Inorganic chemistry
Chemistry
Chemical engineering
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