Simulation of KrCl (222 nm) and XeCl (308 nm) excimer lamps with Kr/HCl(Cl2) and Xe/HCl(Cl2) binary and Ne/Kr/Cl2 ternary mixtures excited by glow discharge

Based on the kinetic models of XeCl and KrCl active media in Kr/HCl(Cl 2 ), Xe/HCl(Cl 2 ), and Ne/Kr/Cl 2 mixtures, the simulation of XeCl and KrCl excimer lamps pumped by glow discharge is carried out. The optimum compositions of the mixtures are determined. The results obtained are compared with the available experimental data.