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Damping effects of capacitive comb fingers on biomimetic MEMS directional microphone
Damping effects of capacitive comb fingers on biomimetic MEMS directional microphone
2011
John Roth
Michael Touse
Jose Sinibaldi
Gamani Karunasiri
Keywords:
Capacitive sensing
Acoustics
Microelectromechanical systems
Electronic engineering
Engineering
Microphone
Correction
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