The effects of magnetic field configuration on the electron parameters of microwave ECR plasma

The electron parameters of a microwave electron cyclotron resonance(ECR) plasma operated in two kinds of magnetic field were measured with Langmuir probe.The effects of magnetic field configuration on the spatial distribution of the electron parameters were investigated.The results indicated that: in divergence magnetic field configuration,the electron temperatures at the axial and edge of cylindrical vacuum are higher than that of intermediate area while it decreases monotonically with increasing radius R in a mirror magnetic field.The electron density all decline with increasing the radial and axial distance in the divergence and mirror magnetic field configuration,but the decline extent of mirror field is larger than that of divergence field.The gas pressure has more influence on the electron temperature in divergence magnetic field than in mirror magnetic field at the vicinity of resonance surface,while it has same effect on the electron density in both of the magnetic field.