Technique and device for preparing high purity boron trifluoride gas

The invention discloses a process for preparing a gas of high-purity boron trifluoride and an installation. The process comprises producing the gas of boron trifluoride by means of directly synthesizing fluoride and elemental boron and preparing the gas high-purity boron trifluoride through dedusting and rectifying the impure gas of boron trifluoride. The installation of the invention mainly comprises a buffer tank, a purifier, a fluoride storage tank, a reactor, a dust remover, a rectifying still, a condenser, an absorber and a vacuum group. The gas of boron trifluoride produced by employing the process and installation of the invention has the advantages of high purity, simple installation, convenient operation, safe operation of the installation, continual production and the like.