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Time saving technique for studying thermal processes in magnetron sputtering of titanium target
Time saving technique for studying thermal processes in magnetron sputtering of titanium target
2021
V.A. Pavlov
V. I. Shapovalov
D. S. Shestakov
A. V. Rudakov
A. E. Shabalin
Keywords:
Titanium
Sputter deposition
time saving
Materials science
Thermal
Optoelectronics
Correction
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