Sensitive detection of infrared photons using a high-Q microcantilever

A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force.The irradiating light is modulated into sinusoidal and pulsed waves,and to be in-phase and anti-phase with the cantilever driving signal.A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed.Under a vacuum of 10-4 Pa,an infrared light power of 7.4 nW was detected with the cantilever.The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.