Wide-spectrum Shack-Hartmann wave-front sensor absolute calibration device and method

2015 
The invention discloses a Shack-Hartmann wave-front sensor absolute calibration device and a Shack-Hartmann wave-front sensor absolute calibration method. The device comprises a converging mirror, a point diffraction plate, a taper hole plate, a high-precision translation table, a collection and control computer, an optical axis positioning template and a monochrometer, wherein the taper hole plate is detachably fixed at the front end of a Shack-Hartmann wave-front sensor to be calibrated; the taper hole center of the taper hole plate is overlapped with the center of a target surface of the Shack-Hartmann wave-front sensor to be calibrated; the collection and control computer is connected with the Shack-Hartmann wave-front sensor to be calibrated and the high-precision translation platform respectively; the converging mirror is arranged on an emergent light path of the monochrometer; the converging mirror, the point diffraction plate and the taper hole plate are positioned on the same optical axis in sequence; the optical axis positioning module is arranged between the point diffraction plate and the taper hole plate. The Shack-Hartmann wave-front sensor absolute calibration device disclosed by the invention has the advantages of realizing absolute calibration of a system error and a physical calibration of the Shack-Hartmann wave-front sensor and improving the system calibration precision.
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