Oligomer probe array chip, related mask and analysis method

Example embodiments may include an oligomer probe array chip based on an analysis-friendly layout. Example oligomer probe array chips may include a substrate, a main array on the substrate having a plurality of sub-arrays in rows or panels, and/or a plurality of alignment spot arrays outside of each of the sub-arrays. The sub-arrays may include a plurality of spots arranged in a matrix to which oligomer probes having different sequences may be attached. Example embodiments may further provide masks for fabricating oligomer probe array chips and hybridization analysis methods of oligomer probearray chips.