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Optimization Design Method for the CMOS-type Capacitive Micro-Machined Ultrasonic Transducer
Optimization Design Method for the CMOS-type Capacitive Micro-Machined Ultrasonic Transducer
2011
D.Y. Chiou
S.B. Luo
H.H. Chen
Keywords:
Engineering
Electronic engineering
Ultrasonic sensor
Capacitive sensing
CMOS
Optoelectronics
Correction
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