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Atmospheric downstream plasma : a new tool for semiconductor processing
Atmospheric downstream plasma : a new tool for semiconductor processing
1998
S. Savastiouk
O. Siniaguine
M.L. Hammond
Keywords:
Plasma
Electronic engineering
Wafer
Semiconductor
Plasma etching
Downstream processing
Analytical chemistry
Materials science
anisotropic plasma
Nanotechnology
semiconductor materials
high pressure
Optics
Optoelectronics
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