Manufacturing method of the liquid immersion member, the liquid immersion member, exposure apparatus, and device manufacturing method

Liquid immersion member (6) the immersion space to hold the liquid (LQ) between the object such that the optical path (K) is filled with the liquid (LQ) of the exposure light irradiated on the object (EL) to form a (LS). Liquid immersion member (6) is an amorphous carbon film is formed on at least a part of a region in contact with the liquid (LQ).