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Acemap > Paper > Preparation of SiC and Si_3N_4 Powders by RF-Plasma(2. Vapor Phase Reactions)( Syntheses of Ceramics by New Techniques (I))

Preparation of SiC and Si_3N_4 Powders by RF-Plasma(2. Vapor Phase Reactions)( Syntheses of Ceramics by New Techniques (I))

1987 
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