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Study of silicon surface layers modified by hydrogen plasma immersion ion implantation and oxidation
Study of silicon surface layers modified by hydrogen plasma immersion ion implantation and oxidation
2020
A. Szekeres
S. Alexandrova
P. Terziyska
Mihai Anastasescu
M. Stoica
M. Gartner
Keywords:
Materials science
Immersion (virtual reality)
Inorganic chemistry
Ion implantation
Plasma
Silicon
Correction
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