Mask plate detection device and method

The invention aims to provide a mask plate detection device and a mask plate detection method. The mask plate detection device comprises a plurality of light-sensitive resistors arranged on the surface of a detection plate, wherein each light-transmitting region on the mask plate is in positional correspondence to action regions of the light-sensitive resistors; the detection plate is used for detecting resistance values of the light-sensitive resistors when parallel light reach the light-sensitive resistors through the light-transmitting regions on the mask plate, judging whether the resistance values of the light-sensitive resistors exceed a standard value or not and feeding back position information of the first light-transmitting region on the mask plate corresponding to the action region of the first light-sensitive resistor when the resistance value of the first light-sensitive resistor in the light-sensitive resistors exceeds the standard value. According to the mask plate detection device and the mask plate detection method, tiny foreign matters on the surface of the mask plate can be determined, and regions where the tiny foreign matters are located can be determined, so that the loss caused by common defects of graphs formed after development due to the tiny foreign matters can be prevented.